METHOD OF COLLECTING MERCURY IN TECHNOLOGICAL CHAMBER OF PLANT FOR MOLECULAR-BEAM EPITAXY AND APPARATUS FOR PERFORMING THE SAME Russian patent published in 1997 - IPC

FIELD: technique of making thin-film laminate coatings. SUBSTANCE: in first contour of mercury collection at temperature near boiling point of mercury (357 C), liquid mercury through funnel 16, pipeline 31 and opened valve 30 is fed to feeder 25; gases desorbed from walls of screen 8 are pumped by pumping means 2. Periodical thawing of screen 8 mounted coaxially inside chamber 1 provides smooth consumption of mercury as its is frozen on screen 9. Then, second contour of mercury collection is used. Mercury is condensed in liquid state on walls of screen 40 and it is fed to feeder 25 through opening 45 and valve 48. Gases separated out of mercury and desorbed from walls of plant are pumped by pumping means 38 protected against mercury penetration by screen 46. If mercury collected in additional contour is insufficiently purified, it is possible to collect it in evaporator 52. Then mercury is heated, its vapors pass through valve 54 along pipeline 53 to screen 39 in order to be condensed onto its walls. Gases are pumped by pumping means 38. If there is no need to purify mercury, it is drained through valve 55 to feeder 25. EFFECT: increased efficiency and reliability of plant, reduced energy consumption by 3-5 times, elimination of mercury contamination with gases and volatile additives and therefore provision of ecologically uncontaminated process. 5 cl, 2 dwg