FIELD: electronic engineering. SUBSTANCE: voltage is applied to anode, cathode, and ignitor electrode; reduced pressure of gases or their mixtures is maintained in working chamber. Uniform layer of cathode material oxides is formed on cathode surface, equal impedances are maintained at each point of anode working surface, and plasma-forming material is removed from discharge gap by means of variable flow. EFFECT: facilitated procedure. 3 cl, 1 dwg
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Authors
Dates
1996-05-27—Published
1991-11-01—Filed