FIELD: microelectronics; manufacture of superconducting microelectronic devices. SUBSTANCE: at least one of ingredients is fluoride of element incorporated in "ВТ СП" film composition; pulsed compression of targets is effected by explosion within explosion speed range of (2-3)
m/s. Target material ingredients are yttrium or rare-earth element - yttrium fluoride or rare-earth metal fluoride, barium fluoride, copper, copper fluoride, as well as bismuth, bismuth fluoride, strontium fluoride, calcium fluoride. EFFECT: increased output of process, improved quality of targets and films obtained. 12 cl, 7 tbl
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