FIELD: instrumentation engineering; displacement and micropositioning of objects and microprobes in surface-analyzing instruments, optical and biophysical plants, microscopes and microrobots for solving solid-body physics, microelectronics, biophysics, and nanotechnology problems. SUBSTANCE: device has main piezoid whose ends carry mounts. Each mount is fitted to base by hold-down device built up of clamping piezoid with tip and flexible member. In first option, clamping piezoid is placed between flexible member and mount; one of its ends is joined with flexible member and its tip rests on mount. In second option, flexible member is placed between clamping piezoid and mount; one end of clamping piezoid is joined with flexible member and its tip rests on base. In third option, mount is placed between clamping piezoid and flexible member; clamping piezoid is joined on one end with base and its tip rests on mount. EFFECT: enlarged functional capabilities. 8 dwg
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Authors
Dates
1996-08-10—Published
1992-05-20—Filed