MICRO MANIPULATOR FOR PRECISE POSITIONING OF PROBE Russian patent published in 1996 - IPC

FIELD: manipulators for electron microscopes. SUBSTANCE: device has plate, which is positioned in horizontal direction, at least three piezoelectric kinematic members, at least one scanning piezoelectric member. Center of gravity in all piezoelectric kinematic members is shifted with respect to horizontal surface. Supporting-pressing unit is attached to scanning piezoelectric member. Said unit holds probe handle so that it slides in vertical direction with respect to supports of supporting-pressing unit when it is exposed to pressure. In addition said probe handle of device provides possibility to mount to it probe of tunnel microscope as well probe of atom-gun microscope. EFFECT: probe is moved not only in horizontal direction but also in vertical one without loss of precision, device provides decreased requirements for precision of horizontal leveling. 5 cl, 9 dwg