FIELD: electrical engineering.
SUBSTANCE: invention relates to electrical engineering and can be used as an actuator for precision movements in optical-mechanical devices, in process equipment for microelectronics, in automatic guidance systems, in mechanical scanning devices and piezodrive drives. Linear stepped piezoelectric motor comprises base, drive mechanism, left and right clamping mechanisms, including piezoelectric elements and flexible hinges, guide and output rods. Guide and output rods are made in the form of single cylindrical rod. Drive mechanism represents a single-loop mechanical converter consisting of a frame with flexible hinges, inside which two piezoelements and spacer between them are installed. Clamping mechanisms represent two-circuit mechanical converters consisting of external and internal frames located perpendicular to each other and containing flexible hinges. Outer frame comprises two piezoelements, each of which on one side has spacer, and on other side of support pad, which is attached to frame. On inner frame jaws of rod gripping are fixed with possibility of their movement inside spacer. Clamping and drive mechanisms are a single permanent element.
EFFECT: technical result consists in increase in the structure stiffness and structural independence from the rod value.
1 cl, 5 dwg
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Authors
Dates
2020-07-22—Published
2019-06-21—Filed