FIELD: electronics. SUBSTANCE: process is related to manufacture of SHF devices of medium capacity. Layer 2.0-3.0 μm thick is formed on surface of metal alloy Pd-Ba by method of ion-plasma deposition of film composition containing palladium and 20-22% of magnesium oxide and is subjected to high-temperature heating under pressure of residual gases not higher than 10-4 Pa. EFFECT: improved operational efficiency of process. 1 tbl
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Authors
Dates
1996-11-27—Published
1990-12-29—Filed