FIELD: machine engineering, optics, electronics and semiconductor technics. SUBSTANCE: method comprises steps of shaping and finishing up in cryogenic media. In order to enhance physicomechanical properties and accuracy of articles, article and tool are cooled until to state of thermodynamic equilibrium with treatment medium. Surface of article is processed to eliminate its contamination. Then article is removed out of treatment medium and it is heated in neutral medium. Pure waste of cryogenic treatment is recovered without contact with atmospheric gases. EFFECT: higher efficiency. 12 cl, 2 dwg
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