METHOD OF PREPARING REFRACTORY METAL SILICIDES Russian patent published in 1997 - IPC

FIELD: powder metallurgy and electronic industry. SUBSTANCE: invention is aimed at preparing monophase refractory metal (Mo,W,Ta,Ti,Fe) disilicides in powder state in a simplified and accelerated process mode and enlarging concentration range of monophase metal disilicide formation. Mix of silicon powder and corresponding metal (23-38 at.% metal and 62-77 at.% silicon) is subjected to processing in mechanochemical reactor for 20-40 min at centrifugal acceleration of grinding bodies 400-1000 m/ and reactor feeling degree 0.3-0.6. Invention can be used when manufacturing parts and articles by powder metallurgy technique, when applying protective coatings, and for manufacturing conducting and resistive elements of integrated microcircuits. EFFECT: simplified and accelerated procedure. 6 tbl