FIELD: inorganic chemistry; preparation of rare-earth or other transition metal fluorides. SUBSTANCE: metal oxides are treated with fluorine by filtering it through layer of powder or oxide granules. Process temperatures are within 470-600 C. Fluorine concentration is 70% by volume. Linear fluorine feed rate is 3-6 cm/s. EFFECT: more efficient preparation process. 4 cl, 3 tbl
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