ELECTROSTATIC CHARGED PARTICLE ENERGY ANALYSER Russian patent published in 2013 - IPC G01N27/00 

FIELD: physics.

SUBSTANCE: electrostatic charged particle energy analyser has coaxially arranged inner and outer cylindrical electrodes; a screening electrode that is electrically connected to the inner cylindrical electrode; inner and outer correcting rings that are electrically insulated from each other and from the cylindrical electrodes, made on the lateral surface of the cylindrical electrode and entrance and exit annular recesses (windows) for flight of secondary electrons that are tightened by a small-structure metal grid; an analysed sample; a built-in electron gun for generating a focused stream of primary electrons; an exit hole diaphragm; an electron receiver; a potential sweep unit of the outer cylindrical electrode; a sweep voltage divider connected to correcting rings, wherein correcting rings located nearer to the entrance window have are cone-shaped, and correcting rings located near to the exit window are discs with openings, wherein the system for compensating for edge effects consists of two pairs of correcting rings which form an electrostatic field in the operating space of the analyser, which provides fourth-order angular focusing of near the angle of 40°.

EFFECT: high energy resolution.

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