ELECTROSTATIC ENERGY ANALYSER WITH ANGULAR RESOLUTION Russian patent published in 2012 - IPC H01J49/28 

FIELD: electricity.

SUBSTANCE: axial-symmetric energy analyser of box type realises the circuit of angular dependencies measurement in the entire range of polar and azimuthal angles with the help of a position sensitive detector. The electron-optical circuit of the energy analyser provides for angular focusing of the fourth order near the central trajectory with an initial polar angle of 90°. Focusing of the fourth order is a criterion of high quality of an energy analyser, since in this case a conflict consisting in simultaneous requirement of high values of illumination and resolution capability compared to the case of focusing with lower orders is considerably weakened. The analyser with energy and angular resolution built in accordance with a proposed circuit may provide for relative energy resolution of less than 0.1% and angular resolution of less than 0.5 degrees, which more than by a factor increases consumer and operational parameters of instruments of such type at considerably more simple configuration of electrodes.

EFFECT: improved analytical, operational and consumer properties of electronic spectrometers with angular resolution used for research of objects of micro- and nanoelectronics by methods of electronic spectroscopy.

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