POSITIONER Russian patent published in 1997 - IPC

FIELD: nanotechnology including scanning microscopy. SUBSTANCE: positioner is manufactured in the form of monolithic symmetric H- shaped rod structure composed of rods with elastic cylindrical joints on ends and middles of rods. Axes of joints are parallel to OZ axis (axis of scanning tunnel microscopy point). Side rods are orthogonal to central rod and are made fast to case of positioner through linear piezoelectric elements. Link carrying working tool (scanning tunnel microscopy point) and optical scale of linear translation pickup is attached to middle of central rod. Positioner also has contactless force transducer which stator and rotor are anchored on case and working tool correspondingly. EFFECT: improved operational stability. 2 cl, 4 dwg