FIELD: piezoelectric voltage-to-mechanical-displacement converting devices.
SUBSTANCE: proposed positioner has object holder and case. The latter mounts three drives incorporating at least one biform member connected through first flexible pusher to movable member. Biform members are, essentially, stacks, each incorporating piezoelectric disk joined along plane with metal diaphragm. Object holder is mounted on fixed member. Object holder can be installed on movable member with aid of lever. Pushers have different stiffness. Piezoelectric disks and metal diaphragms have holes in vicinity of their connection to flexible pushers.
EFFECT: extended scanning range, enhanced reliability.
4 cl, 2 dwg
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