FIELD: measurement technology, measurement of pressure in various fields of technology. SUBSTANCE: pressure transducer has membrane 4 with central 5 and peripheral 6 bulges, two pairs of resistance strain gauges 7,8 and 9,10 correspondingly connected in bridge circuit and contact conductors 11. Bulge 5 has recess 12, bulge 6 has outer surface 13 narrowing towards ring 3. Resistance strain gauges 7,8,9,10 are partially positioned on surfaces of central 5 and peripheral 6 bulges bordering on surface of thin part of membrane 4. Recess 12, bulges 5,6 and ring 3 are conjugate to other adjoining surfaces by elements of toroidal surfaces 14. Resistance strain gauges has expanded sections 15 and 16. Recess 12 and outer surface 13 of peripheral bulge 6 can be made in the form of elements of spherical and toroidal surfaces correspondingly. Expanded sections 15, 16 of resistance strain gauges 7,8,9,10 have smooth expansion of width while approaching contact conductors 11. Resistance strain gauge 7 can be connected to resistance strain gauge 10 with the aid of resistive strip 17 which material temperature coefficient of resistance exceeds temperature coefficient of resistance of material of resistance strain gauges. Resistance strain gauge 9 can be connected to resistance strain gauge 8 by means of resistive strip 18 which material temperature coefficient of resistance exceeds temperature coefficient of resistance of material of resistance strain gauges. Resistive strips 17 and 18 are made identical in shape and dimensions and are placed in symmetry relative to center of membrane. EFFECT: increased reliability, sensitivity and adaptability to manufacture. 7 cl, 2 dwg
Title | Year | Author | Number |
---|---|---|---|
PRESSURE TRANSDUCER | 1991 |
|
RU2010194C1 |
PRESSURE PICKUP | 1993 |
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SEMICONDUCTOR PRESSURE TRANSDUCER | 1992 |
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RU2080573C1 |
SEMICONDUCTOR PRESSURE TRANSDUCER | 1993 |
|
RU2047113C1 |
THIN-FILM PRESSURE TRANSDUCER | 1987 |
|
RU2041452C1 |
METHOD OF MANUFACTURE OF PRESSURE TRANSDUCER | 1987 |
|
RU2028586C1 |
PRESSURE TRANSDUCER | 1994 |
|
RU2082125C1 |
PRESSURE PICKUP AND PROCESS OF ITS MANUFACTURE | 0 |
|
SU1796927A1 |
PRESSURE SENSOR AND METHOD OF MAKING IT | 0 |
|
SU1717978A1 |
PRESSURE PICKUP AND METHOD OF MAKING IT | 1990 |
|
SU1771272A1 |
Authors
Dates
1997-06-20—Published
1994-03-22—Filed