FIELD: heat treatment of articles. SUBSTANCE: the offered vacuum unit has heating chamber, vacuum pumps system, inert gas supply system, heating control system. Installed in heating chamber is airtight container connected with inert gas supply system and accommodated treated articles. Airtight container is connected by means of branch pipe of gas evacuation with heating chamber. Sorption trap is installed in channel of gas evacuation branch pipe. Inert gas supply system has unit of metered cyclic feed of inert gas. Inert gas supply system has supplying cylinder, reducer, pressure gage for monitoring pressure in supplying cylinder and pressure gage for monitoring pressure after reducer, leak and unit for chemical cleaning. Unit of metered cyclic supply of inert gas has metering cylinder, two electric air valves installed before metering cylinder and after metering cylinder. Besides, unit of metering cyclic supply has control panel-of inert gas leak with time relay, gas analyzer with amplifier and vacuum gage for monitoring and control of partial pressure (concentration) of chemically active gases in airtight container. EFFECT: provision of reduction of pressure of active gases and gas saturation of articles. 3 dwg
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Authors
Dates
1997-07-10—Published
1994-10-11—Filed