APPARATUS FOR MANUFACTURING MONOCRYSTALLINE OXIDE FILMS VIA LIQUID-PHASE EPITAXIAL GROWTH PROCESS Russian patent published in 1997 - IPC

Abstract RU 2089679 C1

FIELD: optical technics. SUBSTANCE: apparatus includes isolating central tube with external high-frequency induction heating, conducting cylindrical structural member with openings on the both ends located inside central tube, and a crucible manufactured from conducting material and coaxially disposed in cylindrical structural member. EFFECT: improved quality of manufactured films. 2 cl, 1 dwg

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RU 2 089 679 C1

Authors

Masaru Fudzino[Jp]

Khirosi Takagi[Jp]

Dates

1997-09-10Published

1995-04-06Filed