PROCESS OF FORMATION OF OPTICAL CHANNEL WAVEGUIDES IN LITHIUM NIOBATE Russian patent published in 1997 - IPC

Abstract RU 2089928 C1

FIELD: formation of active elements of waveguide optoelectronics on base of monocrystal of lithium niobate. SUBSTANCE: polished substrates of monocrystal of lithium niobate are subjected in advance to temperature treatment for 20 h as minimum at 900-1100 C. After this diffusion of titanium is conducted to form optical channel waveguide. EFFECT: enhanced efficiency of process. 4 dwg

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RU 2 089 928 C1

Authors

Gladkij V.P.

Rozenson A.Eh.

Jakovenko N.A.

Dates

1997-09-10—Published

1994-09-28—Filed