FIELD: physics.
SUBSTANCE: method includes the steps of setting the shape and dimensions of a portion of the surface of the substrate to be exposed to the plasma; the predetermined portion of the substrate surface is treated with plasma. The plasma contains hydrogen ions with energies less than 10 keV.
EFFECT: ensuring the possibility of improving the quality of the structure of the near-surface layer of the resulting functional element.
2 cl, 2 dwg
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