METHOD OF MAKING PLANAR WAVEGUIDE OF ZINC OXIDE IN LITHIUM NIOBATE Russian patent published in 2013 - IPC C01G9/02 G02B6/10 B81C1/00 C01D15/00 C01G33/00 

FIELD: chemistry.

SUBSTANCE: method of making a planar waveguide of zinc oxide on lithium niobate involves preparing a film-forming solution, holding said solution for 1 day at room temperature, depositing the solution on polished lithium niobate, drying, annealing and gradually cooling in natural cooling conditions of a muffle furnace. The lithium niobate is pre-treated with 96% ethyl alcohol solution. The lithium niobate with the deposited film-forming solution is dried at 60°C for 1 hour, followed by annealing at 400°C in an air atmosphere at heating rate of 14°/min for 1 hour and at 870-1050°C at heating rate of 35°/min for 2-5 hours, with the following ratio of components of the film-forming solution, wt %: zinc nitrate crystalline hydrate 5.2-9.9%; salicylic acid 4.6-4.8%; 96% ethyl alcohol solution - the balance.

EFFECT: invention reduces labour consumption and power consumption of the process of making a planar waveguide which is resistant to radiation in the green spectral region and has maximum refraction index increment values.

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