HIGH-VACUUM ADSORPTION PUMP Russian patent published in 1997 - IPC

FIELD: vacuum engineering. SUBSTANCE: developed adsorbing surfaces, which allow the free path of molecules to be increased, form interconnected forevacuum space 11 and high vacuum space 12. To form these spaces adsorbent 14 on vessel 3 with cooling agent 4, cooled cryogenic panel 7 provided with adsorbent 9 and 10 secured to both of the sides, and sleeve 5 with adsorbent 6 are used. Flowing through evacuating spaces to the pump gases are adsorbed. Hardly absorbed gases, such as helium hydrogen, and neon, enter the space of housing 1 and evacuated with an external high-vacuum pump. EFFECT: enhanced efficiency. 3 cl, 2 dwg