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2 099 598

(13)

C1

(51)

IPC

(21) (22)

Application

95118958/06, 1995-11-09

(22)

Actual filing date

1995-11-09

(45)

Published

1997-12-20

(72)

Inventor

Mal'Tsev V.A.

(73)

Holder

Aktsionernoe Obshchestvo Metallurgicheskij Kombinat"

METHOD OF CREATION OF OIL-FREE VACUUM Russian patent published in 1997 - IPC

Abstract RU 2099598 C1

FIELD: electronic industry; manufacture of clean materials and semiconductor devices of functional electronics. SUBSTANCE: oil-free vacuum is created by means of adsorption pump through cooling it to temperature of liquid nitrogen, sealing up the vacuum chamber and connecting the vacuum chamber inlet with pump inlet. After sealing up the vacuum chamber before connecting its inlet with inlet of pump, air is subjected to dehumidification in vacuum chamber. EFFECT: enhanced efficiency. 1 dwg

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RU 2 099 598 C1

Authors

Mal'Tsev V.A.

Dates

1997-12-20—Published

1995-11-09—Filed

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