FIELD: electronic industry; manufacture of clean materials and semiconductor devices of functional electronics. SUBSTANCE: oil-free vacuum is created by means of adsorption pump through cooling it to temperature of liquid nitrogen, sealing up the vacuum chamber and connecting the vacuum chamber inlet with pump inlet. After sealing up the vacuum chamber before connecting its inlet with inlet of pump, air is subjected to dehumidification in vacuum chamber. EFFECT: enhanced efficiency. 1 dwg
Title | Year | Author | Number |
---|---|---|---|
HIGH VACUUM SYSTEM FOR INDUSTRIAL AND LABORATORY INSTALLATIONS | 2022 |
|
RU2789162C1 |
SYSTEM FOR PRODUCT DEHYDRATION AND METHODS OF ITS USE | 2023 |
|
RU2805404C1 |
APPARATUS FOR FLOW-LINE VACUUM PROCESSING OF CONTINUOUSLY CAST METAL | 1993 |
|
RU2037371C1 |
STEEL WORKING METHOD IN THE PROCESS OF CONTINUOUS POURING | 1993 |
|
RU2030954C1 |
DEVICE FOR IN-LINE DEGASSING OF METAL IN CONTINUOUS CASTING | 1996 |
|
RU2098224C1 |
DEVICE FOR IN-LINE DEGASSING OF METAL IN CONTINUOUS CASTING | 1996 |
|
RU2098225C1 |
METHOD TO WORK METAL IN THE PROCESS OF CONTINUOUS CASTING | 1993 |
|
RU2034680C1 |
DEVICE FOR CONTINUOUS VACUUMIZING OF CONTINUOUSLY-CAST METAL | 1993 |
|
RU2037368C1 |
DEVICE FOR WORKING METAL IN THE PROCESS OF CONTINUOUS POURING | 1993 |
|
RU2029657C1 |
DEVICE FOR METAL WORKING IN THE PROCESS OF CONTINUOUS POURING | 1993 |
|
RU2029658C1 |
Authors
Dates
1997-12-20—Published
1995-11-09—Filed