FIELD: vacuum technology.
SUBSTANCE: invention relates to vacuum technology and is intended for the manufacture and sealing of electrovacuum devices (EVD) and other products. The high-vacuum system of industrial and laboratory installations consists of a series-connected vacuum chamber with heaters, equipped with vacuum gauges, a turbomolecular pump, a valve, and a fore-vacuum pump. A vacuum accumulator equipped with a vacuum gauge is installed at the outlet of the turbomolecular pump behind the valve. An electric valve is installed between the vacuum accumulator and the valve.
EFFECT: increasing reliability, simplifying the design of the vacuum system.
5 cl, 3 dwg
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