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2 099 717

(13)

C1

(51)

IPC

(21) (22)

Application

96107818/28, 1996-04-16

(22)

Actual filing date

1996-04-16

(45)

Published

1997-12-20

(72)

Inventor

Bazhenov V.I.Mukhin A.N.Prozorov S.V.Solov'Ev V.M.Tersenov Ju.G.

(73)

Holder

Aktsionernoe Obshchestvo Priborostroitel'Noe Konstruktorskoe Bjuro"

FLEXIBLE HINGE Russian patent published in 1997 - IPC

Abstract RU 2099717 C1

FIELD: measurement technology. SUBSTANCE: two flexible jumpers are formed in flexible hinge which has identical flexible jumpers positioned at angle to silicon crystal lattice. Hinge couple two parts of sensing element made of monocrystal silicon and capable of relative motion. Longitudinal axes of jumpers are positioned along hinge axis. In every jumper, surface of one part of sensing element and surface of the other part of sensing element arranged on one main surface of sensing element are coupled by one side wall. Second side wall couples surface of one part of sensing element and surface of the other part of sensing element positioned on second main surface of sensing element. EFFECT: higher strength of flexible hinge. 2 cl, 6 dwg

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RU 2 099 717 C1

Authors

Bazhenov V.I.

Mukhin A.N.

Prozorov S.V.

Solov'Ev V.M.

Tersenov Ju.G.

Dates

1997-12-20—Published

1996-04-16—Filed

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