FIELD: microelectronics, formation of functional layers of microcircuits including hybrid, interacted on entire plate, etc. SUBSTANCE: seed layer is formed on surface of material in agreement with process under action of laser radiation in active gas atmosphere. Then functional layer is formed under action of ultraviolet radiation in another gas atmosphere. Process is based on formation of centers of chemosorption under action of laser beam which are formed thanks to disintegration of volatile composition of metal with low activation energy and their usage in the capacity of seed layer to conduct catalytic reactions under action of activating ultraviolet radiation. EFFECT: increased productivity and efficiency of process. 2 cl
