METHOD FOR MEASUREMENT OF COATING THICKNESS ON SUBSTRATE Russian patent published in 1998 - IPC

FIELD: measurement technology. SUBSTANCE: composition of coating layers and substrate of object under test is irradiated by electron beam. Characteristic X-ray radiation 5 is excited in upper layer 1. This radiation penetrates into composition depth and excites secondary characteristic radiation 6 of coating layer positioned below the tested one. Characteristic radiation of massive standard is excited simultaneously by radiation 5. Radiation 6 passed through coating checked by detector 7 and characteristic radiation of massive standard are recorded. Thickness of coating upper layer is judged by value of relation of recorded signal intensities. EFFECT: higher measurement results. 3 dwg