PROCESS MEASURING THICKNESS OF COAT ON SUBSTRATE Russian patent published in 2000 - IPC

Abstract RU 2154807 C2

FIELD: instrumentation. SUBSTANCE: composition of coat layers and substrate that are object of test is irradiated with electron beam. Characteristic X-ray radiation which penetrates depth of composition is excited in upper layer, secondary characteristic radiation of layer of coat lying beneath tested layer is excited. This radiation passing through upper layer of coat is registered by detector. Value of intensity of radiation flux registered by detector determines thickness of coat. EFFECT: expanded application field of process. 3 dwg

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RU 2 154 807 C2

Authors

Parnasov V.S.

Maklashevskij V.Ja.

Zakutaev I.L.

Dates

2000-08-20—Published

1998-01-26—Filed