FIELD: determination of object geometrical parameters. SUBSTANCE: method consists in line-by-line scanning of object with step equal to minimum size of objects, being examined, in measuring the value of signal and determination of point belonging by excess of signal level over background level. Obtained point belonging to object is taken for center of figure approximating the object, and radius is increased continuously till all points or part of figure contour points belong to object. Then center of figure in object being examined is shifted towards object center and radius is increased again till figure center is positioned in center of object being examined. Dimensions and location of objects are determined by obtained radius and figure center coordinates. Figure may be of arbitrary shape. In this case, some characteristic size is taken for radius. EFFECT: higher accuracy and speed of processing, extended field of application. 1 dwg
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Authors
Dates
1998-05-20—Published
1997-01-10—Filed