FIELD: optical engineering. SUBSTANCE: test structure has base and protruding microstructures of correct geometrical form made as needles and positioned on base. Needles may have form of polyhedral pyramid or cone with vertex angle of less 20 deg. Radius of point curvature may be less than 10 nm. Needles may be positioned regularly with constant spacing. EFFECT: provision for full three-dimensional image of needle. 4 cl, 1 dwg
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