FIELD: optical engineering. SUBSTANCE: test structure has base with protruding monocrystal microstructure positioned on it. Microstructures have flat upper surface with horizontal ribs. They are arranged regularly with constant spacing. Horizontal ribs of microstructure upper surface form square, and their unevenness does not exceed 5 nm. Microstructures may be staggered. Horizontal ribs of microstructure upper surface may coincide with crystallographic directions of microstructure of monocrystal material. Test structure provides for calibration of scanning probing microscope in horizontal plane by quick and slow scanning directions and for determination of distortions introduced into image by microscope. EFFECT: optimization of scanning modes. 3 cl, 2 dwg
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