CANTILEVER FOR SCANNING PROBE MICROSCOPE Russian patent published in 1999 - IPC

Abstract RU 2124780 C1

FIELD: nanoengineering equipment; devices used for viewing, measuring, and modifying surfaces of objects in tunnel and separate-power modes. SUBSTANCE: cantilever has base mounting beam whose end distant from base carries needle. Cantilever beam is thinned crosswise. EFFECT: reduced cross sensitivity at high Q-factor of inherent resonant vibrations of beam. 4 dwg

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RU 2 124 780 C1

Authors

Bykov V.A.

Gologanov A.N.

Dates

1999-01-10Published

1996-12-06Filed