FIELD: nanoengineering equipment; devices used for viewing, measuring, and modifying surfaces of objects in tunnel and separate-power modes. SUBSTANCE: cantilever has base mounting beam whose end distant from base carries needle. Cantilever beam is thinned crosswise. EFFECT: reduced cross sensitivity at high Q-factor of inherent resonant vibrations of beam. 4 dwg
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Authors
Dates
1999-01-10—Published
1996-12-06—Filed