FIELD: microscopy. SUBSTANCE: testing structure is composed of base and protruding monocrystalline microstructures with specified geometric parameters arranged on it. Microstructures have horizontal upper surface. Side surfaces of microstructures have microrelief. Microstructures may have vertical side surfaces. In this case relief of side surfaces of microstructures has sawtooth shape with teeth in the form of isosceles triangles in section perpendicular to base. If side surfaces of microstructures have inclination then relief has sawtooth shape with triangular teeth. Protruding microstructures may be manufactured in the form of corrugations or columns arranged in regular order which upper surface has square or rectangular shape. Testing structure ensures determination of parameters of needle of probe of cantilever with scanning of side surfaces and effective calibration of microscope. EFFECT: improved authenticity of determined parameters. 4 cl, 4 dwg
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