FIELD: medical engineering and other industries where high purity of air being fed and high productivity are required. SUBSTANCE: compressor is made in form of special valve located on bearing surface of end member of vibrator through gas film of lubricant. Sprinkler made on base of this compressor makes it possible to deliver liquid in synchronism with ultrasonic concentrator consisting of main and additional concentrators. EFFECT: ease in maintenance; improved operational reliability. 3 cl, 2 dwg
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