HIGH-FREQUENCY INDUCTION PLASMA GENERATOR Russian patent published in 1999 - IPC

Abstract RU 2142679 C1

FIELD: plasma equipment, in particular, for chemistry and metallurgy. SUBSTANCE: spaces between water-cooled tubes are covered with insertions which are made from dielectric temperature-resistant material. Inductor embraces metal chamber, which is formed by tubes, and dielectric jacket, which separates metal chamber from inductor. Dielectric jacket is shaped by at least three layers. First layer is directed towards metal chamber and is made from epoxy compound with temperature-resistant dielectric hydrophilic filler. Second layer is made from silicon-organic compound. Third one is made from temperature-resistant dielectric hydrophilic fabric. Height of each layer of dielectric jacket is within range of 1.0-1.5 mm. EFFECT: elimination of electric discharges, increased stability and service life for several hundred hours, design without expensive materials. 2 cl, 1 dwg

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RU 2 142 679 C1

Authors

Shamin V.I.

Budenkov E.A.

Malenko V.I.

Dates

1999-12-10Published

1998-04-10Filed