FIELD: plasma equipment, in particular, for chemistry and metallurgy. SUBSTANCE: spaces between water-cooled tubes are covered with insertions which are made from dielectric temperature-resistant material. Inductor embraces metal chamber, which is formed by tubes, and dielectric jacket, which separates metal chamber from inductor. Dielectric jacket is shaped by at least three layers. First layer is directed towards metal chamber and is made from epoxy compound with temperature-resistant dielectric hydrophilic filler. Second layer is made from silicon-organic compound. Third one is made from temperature-resistant dielectric hydrophilic fabric. Height of each layer of dielectric jacket is within range of 1.0-1.5 mm. EFFECT: elimination of electric discharges, increased stability and service life for several hundred hours, design without expensive materials. 2 cl, 1 dwg
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Authors
Dates
1999-12-10—Published
1998-04-10—Filed