FIELD: supply of working fluid to chambers for heating. SUBSTANCE: two main ducts to supply fluid into chambers for heating are formed in microinjector. Capability for supply of working fluid into chambers for heating is provided even if there is obstacle caused by dust, or particles, or defect of pickling as working fluid can be supplied over another duct communicating with first duct. Apart from them there can be formed auxiliary duct intended for supply of working fluid into chambers for heating having curvilinear shape or assemblage of protrusions can be formed on outer walls of shutting layers of chambers which limit auxiliary duct that supplies working fluid into chambers for heating to enhance pressure loss. As result capability for prevention of withdrawal of working fluid back is provided which leads to uniform operation of membranes. EFFECT: provision for uniform operation of membranes. 11 cl, 7 dwg
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Authors
Dates
2000-03-20—Published
1998-11-03—Filed