METHOD CHECKING HORIZONTAL POSITION OF SURFACE Russian patent published in 2001 - IPC

Abstract RU 2165073 C1

FIELD: optical methods of control of horizontal position of surfaces. SUBSTANCE: thermocapillary convective vortex is excited in layer of low-viscosity clear liquid placed on radiation absorbing substrate by laser beam in agreement with invention. Free surface of liquid is deformed, deformation having shape of recess. Interference picture is observed on screen that is positioned in cross-section of caustic of laser beam reflected from recess. Horizontal position of surface is checked by form and distribution of intensity in interference picture. EFFECT: enhanced accuracy of check of horizontal position of surface. 3 dwg

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RU 2 165 073 C1

Authors

Bezuglyj B.A.

Fedorets A.A.

Dates

2001-04-10—Published

2000-03-21—Filed