METHOD AND DEVICE FOR MANUFACTURING LENS-SHAPED CRYSTAL ELEMENTS Russian patent published in 2001 - IPC

FIELD: piezoelectric engineering; lens-shaped chips for resonators and monolithic filters. SUBSTANCE: method involves chemical etching of blank in liquid etcher. In the course of etching blank is placed close to screen fixed in position relative to the latter and primarily maid of material resistant to chemically active etching agent; the latter fills up gap measuring not over 0.2 r which is bounded on one side with surface of blank being treated and on other, with screen, where r is least distance from axial line drawn through top of lens-shaped etching profile normal to blank or screen surface to edge of blank or screen. Device implementing proposed method has two bases joined together by means of braces, screens, and hold- down piece for assembling blanks and screens to form stack. Screens are loosely mounted on braces and have projections on at least one side abutting against non-working areas on blank surfaces and provide for desired gap between surfaces of screens and blanks at points of etching lens-shaped profiles. Blank surfaces function as screens and desired gap between blanks is provided by inserts loosely mounted on braces. Crystal elements manufactured in this way may be used at frequencies as high as 20 MHz and higher still at their thickness about 80 mcm. EFFECT: enhanced output due to optimization of manufacturing process. 3 cl, 10 dwg, 1 tbl