Patenton — panteon of patents

(19)

RU

(11)

2 079 865

(13)

C1

(51)

IPC

(21) (22)

Application

94017322/07, 1994-05-11

(22)

Actual filing date

1994-05-11

(45)

Published

1997-05-20

(72)

Inventor

Korzh I.A.

(73)

Holder

Omskij Nauchno-Issledovatel'Skij Institut Priborostroenija

METHOD FOR MAKING RELIEF PATTERNS IN DIELECTRIC SUBSTRATES Russian patent published in 1997 - IPC

Abstract RU 2079865 C1

FIELD: microelectronics; patterning in dielectric and piezoelectric substrates in fabricating waveguides, micromechanical devices, quartz resonators, etc. SUBSTANCE: a dielectric film is applied onto a substrate and made into a protective mask configuration. Then the substrate is etched. Neodymium monoaluminate film with a thickness of no less than 1 mcm is used as a material for the mask. EFFECT: facilitated procedure.

Similar patents RU2079865C1

Title Year Author Number
PROCESS OF RELIEF FABRICATION IN DIELECTRIC SUBSTRATE 1992
  • Stoletov I.S.
  • Korzh I.A.
  • Dorokhina G.S.
 RU2054747C1
METHOD FOR PRODUCING EMBOSSED SURFACE ON DIELECTRIC SUBSTRATE 2005
  • Korzh Ivan Aleksandrovich
 RU2318268C2
AT-CUR CRYSTAL ELEMENT MANUFACTURING PROCESS 1995
  • Kibirev S.N.
  • Jarosh A.M.
 RU2117382C1
METHOD TO MANUFACTURE QUARTZ CRYSTALLINE ELEMENTS OF Z-SECTION 2012
  • Netesin Nikolaj Nikolaevich
  • Korotkova Galina Petrovna
  • Korzenev Gennadij Nikolaevich
  • Povolotskij Sergej Nikolaevich
  • Karpova Margarita Valer'Evna
  • Aksenova Ol'Ga Vladimirovna
  • Korolev Oleg Valentinovich
  • Aladysheva Natal'Ja Nikolaevna
  • Shil'Nikov Anton Aleksandrovich
 RU2475950C1
METHOD OF PRODUCING RELIEF IN DIELECTRIC SUBSTRATE 2018
  • Pautkin Valerij Evgenevich
  • Abdullin Farkhad Anvyarovich
  • Petrin Vladimir Alekseevich
  • Mishanin Aleksandr Evgenevich
 RU2687299C1
PROCESS OF MANUFACTURE OF QUARTZ CRYSTALLINE ELEMENTS 1989
  • Kibirev S.N.
  • Filimendikova T.S.
  • Jarosh A.M.
 RU1739826C
METHOD FOR TUNING SUPERNARROW-BAND ACOUSTIC-SURFACE-WAVE ELEMENT TO CENTER FREQUENCY 2000
  • Zima V.N.
  • Marina T.N.
 RU2190922C2
PIEZOELECTRIC CAVITY 1992
  • Kibirev S.N.
  • Kolesnikov V.N.
  • Jarosh A.M.
 RU2047267C1
SOLUTION FOR REMOVING ALUMINIUM FILMS BY PICKLING 0
  • Korzh Ivan Aleksandrovich
  • Odintsova Lyudmila Alekseevna
  • Panasenko Eleonora Grigorevna
  • Petrova Valentina Zakharovna
 SU956620A1
PIEZOELECTRIC RESONATOR 1994
  • Kibirev S.N.
  • Jarosh A.N.
  • Kolesnikov V.N.
 RU2107987C1

RU 2 079 865 C1

Authors

Korzh I.A.

Dates

1997-05-20—Published

1994-05-11—Filed

read Similar patents