METHOD TO MANUFACTURE PIEZOELEMENTS FOR HIGH-FREQUENCY RESONATORS Russian patent published in 2012 - IPC H03H3/02 

FIELD: electricity.

SUBSTANCE: method to manufacture piezoelements (PE) for high-frequency resonators includes mechanical polishing and buffing of plates from piezoelectrics, sputtering of metal films of a protective coat onto plates with an adhesive sublayer of vanadium, formation of crystalline elements by chemical etching, removal of a protective coat in solutions of acids and sputtering of electrodes with an adhesive sublayer of vanadium onto crystalline elements, besides, when sputtering a protective coat, thickness of the vanadium film makes 5-10 nm, and when sputtering of electrodes, the vanadium film is applied with thickness of 15-20 nm, at the same time removal of a protective coat and electrodes, when required, is carried out in an aqueous solution containing 0.4-0.5 vol % HCl and 4-7 vol % H₂O₂.

EFFECT: higher reliability of a protective coat of high-frequency resonators by optimisation of thickness of an adhesive sublayer on operations of sputtering of a protective and electrode coat, increased efficiency of manufacturing resonators due to optimisation of a solution composition for removal of coats.

2 cl, 6 dwg, 2 tbl