METHOD FOR TUNING SUPERNARROW-BAND ACOUSTIC-SURFACE-WAVE ELEMENT TO CENTER FREQUENCY Russian patent published in 2002 - IPC

Abstract RU 2190922 C2

FIELD: acoustoelectronics; manufacture of acoustic-surface-wave devices. SUBSTANCE: method involves reduction of thickness of aluminum film used for manufacturing interdigital transducers and reflecting gratings by step-by-step etching in 15-25-% solution of potassium hydroxide at etching temperature of 15-25 C for maximum 10 s during each chemical etching step. EFFECT: reduced labor consumption for element manufacture. 3 dwg

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RU 2 190 922 C2

Authors

Zima V.N.

Marina T.N.

Dates

2002-10-10—Published

2000-11-30—Filed