FIELD: process engineering.
SUBSTANCE: invention relates to processing of crystalline elements from lanthanum-gallium silicate (LGS) and may be used in radio electronic engineering for fabrication of HF resonators and broadband filters. Proposed method comprises stepwise grinding of LGS plates by emery with "ЭБ8", M28, M14 grain size, chemical etching of plates in solution HCl:HF:H2O=1:10:30 at 70-90°C, mechanical finishing with removal of surface layer to depth of 5 mcm, chemical etching in solution HCl:HF:H2O=1:50:150 and finish machining of plates.
EFFECT: higher efficiency of processing.
4 dwg
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Authors
Dates
2011-10-10—Published
2009-07-27—Filed