DEVICE FOR PHOTOLUMINESCENT CHART-MAKING OF SEMICONDUCTOR PLATES ( VERSIONS ) Russian patent published in 2001 - IPC

Abstract RU 2172946 C1

FIELD: non-destructive testing. SUBSTANCE: device is supplemented with rotary table carrying microscopic stage. Photoluminescence sensor includes flat inclined mirror with hole for passage of laser beam placed above objective lens. Focus of objective lens is optically aligned with photodetector via inclined mirror and condenser. EFFECT: increased rapid action. 12 cl, 5 dwg

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RU 2 172 946 C1

Authors

Mitjukhljaev V.B.

Dates

2001-08-27—Published

2000-08-01—Filed