DEVICE FOR CARRYING OUT SEMICONDUCTOR STRUCTURE QUALITY CONTROL Russian patent published in 1995 - IPC

Abstract RU 2046318 C1

FIELD: electronic engineering. SUBSTANCE: device has semiconductor structure under control, optical system, personal computer with monitor and printer. The device also has photometric ball having illuminators and digital telecamera located in the side windows, telecamera input being optically coupled with the structure under control by means of the optical system. EFFECT: enhanced effectiveness of quality control. 1 dwg

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RU 2 046 318 C1

Authors

Alekseev V.D.

Erokhov A.K.

Butenko P.S.

Kasmynin M.A.

Kamentsev V.E.

Dates

1995-10-20Published

1991-08-26Filed