FIELD: physics.
SUBSTANCE: invention relates to devices for measuring, using a scanning probe microscope (SPM), relief, linear dimensions and other characteristics of objects, primarily in biology, with simultaneous optical observation of the object in light passing through the object. The SPM has an inverted optical microscope object table and a measuring head, having a base with supports for mounting onto the object table, an XYZ scanning unit fitted with a probe sensor, a laser and a photodetector, optical components for directing the laser beam onto the probe sensor and from the probe sensor to the photodetector, as well as adjusting elements. The adjusting elements are mounted on the base with possibility of parallel deflection of the laser beam.
EFFECT: enabling use of a large aperture illumination system for optical observation, high scanning speed.
7 cl, 6 dwg
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