FIELD: measuring and diagnostic equipment.
SUBSTANCE: invention relates to measuring and diagnostic equipment, more specifically to near-field microscopy in the terahertz (THz) spectral region. The terahertz subwavelength scanning microscope contains a continuous laser, a galvanometer with mirrors for x-y scanning, a beam expander, a focusing lens, a terahertz radiation emitter, an optical cryostat, a spectrometer, an incoherent terahertz radiation detector, parabolic mirrors for collecting and delivering terahertz radiation to incoherent terahertz radiation. The emitter is placed in an optical cryostat and is a subject stage for an object, and is made in the form of a layer of semiconductor material that absorbs laser radiation. A layer of semiconductor material is located on a highly doped semiconductor substrate that is transparent to laser radiation and absorbs terahertz radiation.
EFFECT: microscope provides a simplified design while maintaining resolution.
5 cl, 5 dwg
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