WIDEBAND SPECTROMETER OF SURFACE ELECTROMAGNETIC WAVES Russian patent published in 2001 - IPC

FIELD: examination of fleeting processes on the surface of metals and semiconductors by optical methods, applicable in spectrometry of oxide and adsorbed layers. SUBSTANCE: spectrometer has a light source, objective lens, transparent metal film applied onto the hypothenuse face of a triangular prism used as the supporting structure, lens whose axis is perpendicular to the other lateral face of the prism, and a spectrograph, additionally used is a prism made of material that is transparent for light of visible and infrared spectra and placed on the path of the light beam between the objective lens and the metal film so that one of its lateral faces is parallel to the film external surface on whose roughness the light sets up surface electromagnetic waves and is moved away from it at a distance equal to the depth of penetration of the field of surface electromagnetic waves of the infrared spectrum in the environment, the light falls on this face at an angle smaller than the critical one, as well as an additional lens whose optical axis is perpendicular to the other lateral face of the additional prism, and a spectrograph of the infrared spectrum whose inlet is positioned in the rear focal plane of the additional lens. EFFECT: enhanced functioning frequency band. 2 dwg