SURFACE ELECTROMAGNETIC WAVE SPECTROMETER Russian patent published in 1997 - IPC

FIELD: examination of fast-speed processes on the surface of metals and semiconductors by optical methods. SUBSTANCE: the reflectometer surface electromagnetic wave spectrometer uses a white light source, collimator, polarizer, TIR prism, dispersing element and a photodetector device furnished with a bar of photodetectors, device for processing and output of measurement and calculation results; the prism is made as a transparent vessel filled with liquid having index of reflection n_rej exceeding the index of reflection of the environment. The vessel bottom is a detachable transparent stiff plate with index of reflection n_pl= n_rej, semitransparent metal film is applied onto the plate exterior surface. Positioned in liquid on the path of incident and reflected beams are two broken mirrors with the same number of faces positioned on the path of radiation of the dispersing elements and photodetector device reflected from the second mirror. EFFECT: improved design. 2 dwg