PROCESS OF EXAMINATION OF CONDUCTIVE SURFACE Russian patent published in 2001 - IPC

FIELD: nondestructive testing. SUBSTANCE: invention is related to sphere of quality inspection of surfaces of solid bodies by optical methods, namely, to detection of flaws and microobjects on flat surfaces of conducting and semiconducting articles by way of registration of excitation of surface electromagnetic waves. It can find use in optical instrumentation, ecological monitoring, in chemical, physical, medicobiological and other investigations. Process of examination of conductive surface includes action by beam of collimated linearly polarized monochromatic radiation on examined surface of specimen, selection of orientation of plane of radiation polarization, excitation of surface electromagnetic waves on surface of specimen by this radiation, recording of reflected radiation, computation of distribution of controlled optical parameter of layer on surface by measurement results. Plane of polarization of incident radiation is inclined through angle Θ₀ relative to plane of incidence. Spatial distribution of angle Θ of incidence of plane of polarization of reflected radiation with reference to plane of incidence is measured in cross-section of beam of reflected radiation with compensation of phase shift between p and s components of radiation per each controlled point in section that emerges with excitation of surface electromagnetic waves. Measurement limits are regulated by change of value of angle Θ₀. EFFECT: increased accuracy of determination of controlled parameter. 2 dwg