LENS FOR STEP-BY-STEP MULTIPLICATION UNIT MADE FROM QUARTZ GLASS Russian patent published in 2001 - IPC

Abstract RU 2175647 C2

FIELD: printing industry. SUBSTANCE: invention relates to multiplication unit capable of being used in photolithography at wavelengths 193 and 248 nm. Lens resistant to laser effects (pressing or compaction) is made either by flame hydrolysis technique or according to sol-gel method using organosilicon compounds. When irradiated by high-intensity dose of excimer emission (I²N = 6,3•10¹⁰), lens shows phase front distortion less than 0.095 ppm. EFFECT: improved photolithographic process reliability. 5 cl, 1 dwg

Similar patents RU2175647C2

Title	Year	Author	Number
METHOD OF MANUFACTURE PIECES WITH COMPOSITE CORE FOR OPTICAL WAVEGUIDES (VERSIONS)	1998	Berki Dzhordzh Eh.	RU2173672C2
METHOD OF MANUFACTURING OPTICAL FIBERS	1997	Berki Dzhordzh Eh.	RU2169710C2
METHOD OF PURIFYING POLYALKYLSILOXANES AND PRODUCT THUS PREPARED	1996	Khenderson Denni Li Pauehrs Dejl Robert	RU2161166C2
METHOD OF CUTTING DOWN NUMBER OF BUBBLES IN GLASS PRODUCT (VARIANTS) AND GLASS PRODUCT	1997	Ehntos Ehlfred Dzhozef Chu Polli	RU2179159C2
SINGLE-MODE FIBER-OPTICAL WAVEGUIDE WITH CONTROLLED DISPERSION AND PROCESS OF ITS MANUFACTURE ( VARIANTS )	1996	Berki Dzhordzh Ehdvard Bkhagavatula Venkata Adizeshaja Dzhounz Piter Kristofer Kek Donald Brjus L'Ju Janming Modejvis Robert Ehdam Morrou Ehlan Dzhon N'Jukhaus Mark Ehndrju Noulen Dehniehl Alojzius	RU2178901C2
OPTICAL FIBRE WITH HIGH CONTENT OF CHLORINE AND LOW COEFFICIENT OF ATTENUATION	2015	Berki Dzhordzh Edvard Bukbinder Dana Krejg Li Min-Tszyun Tandon Pushkar	RU2706849C2
WATER AND ORGANIC MOLECULE ABSORBER, LASER DEVICE, OPTICAL AMPLIFIER PUMPING DEVICE, AND ABSORBER PRODUCTION PROCESS (ALTERNATIVES)	1995	Bartolom'Ju Rodzher Frehnk Fehjber Margaret Ketlin Sharps Dzhulia Ehlison Zon Kehnnet Ehlmer	RU2160489C2
METHOD OF MAKING POROUS BLANK FOR MULTIMODE FIBER OPTICS WITH GRADUATED REFRACTION INDEX	1990	Dejl Robert Pauehrz[Us] Kennet Genri Sehndkhejdzh[Us] Majkl Dzhon Stalker[Us]	RU2086513C1
SINGLE-MODE OPTICAL WAVEGUIDE WITH LARGE EFFECTIVE AREA ( VERSIONS )	1996	L'Ju Janming	RU2166782C2
METHOD FOR CONTROLLING OPTIC GLASS FIBER MANUFACTURE AND METHOD OF OPTIC GLASS FIBER MANUFACTURE	1991	Gregori Judzhin Smit[Us]	RU2096354C1

RU 2 175 647 C2

Authors

Borrelli Nikolas F.

S'Juard Tomas P.

Smit Charlin

Dates

2001-11-10—Published

1997-08-27—Filed