DEVICE DETERMINING ROUGHNESS OF SURFACE Russian patent published in 2002 - IPC

FIELD: measurement technology. SUBSTANCE: device is intended to determine roughness of super smooth and flat metal, semiconductor and dielectric articles. It includes laser, ellipsoid of revolution with internal mirror surface and holes arranged in plane of incidence of laser beam coupled to laser. Axis of laser beam is matched with first focus of ellipsoid. Device also has second and third photodetectors, second photodetector being placed on optical axis of mirror component of reflected light and optically coupled to ellipsoid through its output hole. Third photodetector is installed in second focus of ellipsoid. First photodetector faces output hole of ellipsoid with sensitive surface. EFFECT: raised accuracy of determination of roughness of surface. 3 dwg